JPH0337135B2 - - Google Patents

Info

Publication number
JPH0337135B2
JPH0337135B2 JP60049949A JP4994985A JPH0337135B2 JP H0337135 B2 JPH0337135 B2 JP H0337135B2 JP 60049949 A JP60049949 A JP 60049949A JP 4994985 A JP4994985 A JP 4994985A JP H0337135 B2 JPH0337135 B2 JP H0337135B2
Authority
JP
Japan
Prior art keywords
measured
air
hot air
measurement
purification means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60049949A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61209338A (ja
Inventor
Isao Hishikari
Takao Kobayashi
Susumu Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chino Corp
Original Assignee
Chino Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chino Corp filed Critical Chino Corp
Priority to JP4994985A priority Critical patent/JPS61209338A/ja
Publication of JPS61209338A publication Critical patent/JPS61209338A/ja
Publication of JPH0337135B2 publication Critical patent/JPH0337135B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N21/15Preventing contamination of the components of the optical system or obstruction of the light path

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Measuring Cells (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
JP4994985A 1985-03-13 1985-03-13 光学的測定装置 Granted JPS61209338A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4994985A JPS61209338A (ja) 1985-03-13 1985-03-13 光学的測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4994985A JPS61209338A (ja) 1985-03-13 1985-03-13 光学的測定装置

Publications (2)

Publication Number Publication Date
JPS61209338A JPS61209338A (ja) 1986-09-17
JPH0337135B2 true JPH0337135B2 (en]) 1991-06-04

Family

ID=12845279

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4994985A Granted JPS61209338A (ja) 1985-03-13 1985-03-13 光学的測定装置

Country Status (1)

Country Link
JP (1) JPS61209338A (en])

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0530083Y2 (en]) * 1988-08-08 1993-08-02
JP2617001B2 (ja) * 1989-10-12 1997-06-04 株式会社東京精密 ダイシングマシン
US5438415A (en) * 1991-01-30 1995-08-01 Nkk Corporation Ellipsometer and method of controlling coating thickness therewith
US20050005717A1 (en) * 2003-07-10 2005-01-13 Pfizer Inc Probe holder
DE102009045472B4 (de) * 2009-10-08 2021-06-17 Endress+Hauser Conducta Gmbh+Co. Kg Sensorsystem

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS436238Y1 (en]) * 1965-11-20 1968-03-19
JPS5160283U (en]) * 1974-11-06 1976-05-12
JPS5512050Y2 (en]) * 1975-10-15 1980-03-15

Also Published As

Publication number Publication date
JPS61209338A (ja) 1986-09-17

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term