JPH0337135B2 - - Google Patents
Info
- Publication number
- JPH0337135B2 JPH0337135B2 JP60049949A JP4994985A JPH0337135B2 JP H0337135 B2 JPH0337135 B2 JP H0337135B2 JP 60049949 A JP60049949 A JP 60049949A JP 4994985 A JP4994985 A JP 4994985A JP H0337135 B2 JPH0337135 B2 JP H0337135B2
- Authority
- JP
- Japan
- Prior art keywords
- measured
- air
- hot air
- measurement
- purification means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Measuring Cells (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4994985A JPS61209338A (ja) | 1985-03-13 | 1985-03-13 | 光学的測定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4994985A JPS61209338A (ja) | 1985-03-13 | 1985-03-13 | 光学的測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61209338A JPS61209338A (ja) | 1986-09-17 |
JPH0337135B2 true JPH0337135B2 (en]) | 1991-06-04 |
Family
ID=12845279
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4994985A Granted JPS61209338A (ja) | 1985-03-13 | 1985-03-13 | 光学的測定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61209338A (en]) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0530083Y2 (en]) * | 1988-08-08 | 1993-08-02 | ||
JP2617001B2 (ja) * | 1989-10-12 | 1997-06-04 | 株式会社東京精密 | ダイシングマシン |
US5438415A (en) * | 1991-01-30 | 1995-08-01 | Nkk Corporation | Ellipsometer and method of controlling coating thickness therewith |
US20050005717A1 (en) * | 2003-07-10 | 2005-01-13 | Pfizer Inc | Probe holder |
DE102009045472B4 (de) * | 2009-10-08 | 2021-06-17 | Endress+Hauser Conducta Gmbh+Co. Kg | Sensorsystem |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS436238Y1 (en]) * | 1965-11-20 | 1968-03-19 | ||
JPS5160283U (en]) * | 1974-11-06 | 1976-05-12 | ||
JPS5512050Y2 (en]) * | 1975-10-15 | 1980-03-15 |
-
1985
- 1985-03-13 JP JP4994985A patent/JPS61209338A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS61209338A (ja) | 1986-09-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |